R. C. Erckens: search on Z-Library

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1

Precuring implant photoresists for shrink and patterning control

Winroth, Gustaf, Rosseel, Erik, Delvaux, Christie, Sanchez, Efrain Altamirano, Ercken, Monique

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Year:

2013

Language:

english

File:

PDF, 2.37 MB

english, 2013

2

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 23 February 2014)] Optical Microlithography XXVII - Modeling the lithography of ion implantation resists on topography

Lai, Kafai, Erdmann, Andreas, Winroth, Gustaf, Vaglio Pret, Alessandro, Ercken, Monique, Robinson, Stewart A., Biafore, John J.

Year:

2014

Language:

english

File:

PDF, 2.30 MB

english, 2014

3

[IEEE IEDM Technical Digest. IEEE International Electron Devices Meeting, 2004. - San Francisco, CA, USA (Dec. 13-15, 2004)] IEDM Technical Digest. IEEE International Electron Devices Meeting, 2004. - A 0.314μm/sup 2/ 6T-SRAM cell build with tall triple-gate devices for 45nm node applications using 0.75NA 193nm lithography

Nackaerts, A., Ercken, M., Demuynck, S., Lauwers, A., Baerts, C., Bender, H., Boulaert, W., Collaert, N., Degroote, B., Delvaux, C., de Marneffe, J.F., Dixit, A., De Meyera, K., Mendrickx, E., Heylen,

Year:

2004

Language:

english

File:

PDF, 259 KB

english, 2004

4

Raman Spectroscopy for Non-Invasive Characterization of Ocular Tissue: Potential for Detection of Biological Molecules

Roel J. Erckens, Massoud Motamedi, Wayne F. March, James P. Wicksted

Journal:

Journal of Raman Spectroscopy

Year:

1997

Language:

english

File:

PDF, 399 KB

english, 1997

5

SPIE Proceedings [SPIE SPIE 31st International Symposium on Advanced Lithography - San Jose, CA (Sunday 19 February 2006)] Advances in Resist Technology and Processing XXIII - Top coat or no top coat for immersion lithography?

Stepanenko, N., Lin, Qinghuang, Kim, Hyun-Woo, Kishimura, S., Van Den Heuvel, D., Vandenbroeck, N., Kocsis, M., Foubert, P., Maenhoudt, M., Ercken, M., Van Roey, F., Gronheid, R., Pollentier, I., Vang

Year:

2006

Language:

english

File:

PDF, 498 KB

english, 2006

6

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California (Sunday 12 February 2012)] Optical Microlithography XXV - Process development using negative tone development for the dark field critical layers in a 28nm node process

Versluijs, Janko, Truffert, Vincent, Murdoch, Gayle, De Bisschop, Peter, Trivkovic, Darko, Wiaux, Vincent, Kunnen, Eddy, Souriau, Laurent, Demuynck, Steven, Ercken, Monique, Conley, Will

Year:

2012

Language:

english

File:

PDF, 18.93 MB

english, 2012

7

[IEEE 2018 IEEE International Interconnect Technology Conference (IITC) - Santa Clara, CA (2018.6.4-2018.6.7)] 2018 IEEE International Interconnect Technology Conference (IITC) - Subtractive Etch of Ruthenium for Sub-5nm Interconnect

Wan, Danny, Paolillo, Sara, Rassoul, Nouredine, Kotowska, Bogumila Kutrzeba, Blanco, Victor, Adelmann, Christoph, Lazzarino, Frederic, Ercken, Monique, Murdoch, Gayle, Bommels, Jurgen, Wilson, Christo

Year:

2018

Language:

english

File:

PDF, 1.94 MB

english, 2018

8

Optimization of an advanced positive tone DUV photoresist towards 150 nm and beyond

M. Ercken, M. Moelants, G. Vandenberghe, M. Goethals, K. Ronse, S. Masuda, W. Spiess, G. Pawlowski

Journal:

Microelectronic Engineering

Year:

2000

Language:

english

File:

PDF, 1.90 MB

english, 2000

9

An Index of Biotic Integrity characterizing fish populations and the ecological quality of Flandrian water bodies

Claude Belpaire, Roel Smolders, Ina Vanden Auweele, Dirk Ercken, Jan Breine, Gerlinde Van Thuyne, Frans Ollevier

Journal:

Year:

2000

Language:

english

File:

PDF, 221 KB

english, 2000

10

Raman Spectroscopy in Ophthalmology: From Experimental Tool to Applications In Vivo

R.J. Erckens, F.H.M. Jongsma, J.P. Wicksted, F. Hendrikse, W.F. March, M. Motamedi

Journal:

Lasers in Medical Science

Year:

2001

Language:

english

File:

PDF, 204 KB

english, 2001

11

Detection of Raman Spectra in Ocular Drugs for Potential In Vivo Application of Raman Spectroscopy

Elshout, Mari, Erckens, Roel J., Webers, Carroll A., Beckers, Henny J., Berendschot, Tos T., de Brabander, John, Hendrikse, Fred, Schouten, Jan S.

Journal:

Journal of Ocular Pharmacology and Therapeutics

Year:

2011

Language:

english

File:

PDF, 547 KB

english, 2011

12

Confocal Raman spectroscopy system for noncontact scanning of ocular tissues: an in vitro study

Erckens, Roel J.

Journal:

Optical Engineering

Year:

1997

Language:

english

File:

PDF, 206 KB

english, 1997

13

SPIE Proceedings [SPIE Microlithography 2005 - San Jose, CA (Sunday 27 February 2005)] Metrology, Inspection, and Process Control for Microlithography XIX - Full spectral analysis of line width roughness

Leunissen, L. H. A., Lorusso, G. F., Ercken, M., Croon, J. A., Yang, H., Azordegan, A., DiBiase, T., Silver, Richard M.

Year:

2005

Language:

english

File:

PDF, 288 KB

english, 2005

14

SPIE Proceedings [SPIE Microlithography 2000 - Santa Clara, CA (Sunday 27 February 2000)] Advances in Resist Technology and Processing XVII - Progress in qualifying and quantifying the airborne base sensitivity of modern chemically amplified DUV photoresists

Kinkead, Devon A., Ercken, Monique, Houlihan, Francis M.

Year:

2000

Language:

english

File:

PDF, 821 KB

english, 2000

15

SPIE Proceedings [SPIE 26th Annual International Symposium on Microlithography - Santa Clara, CA (Sunday 25 February 2001)] Optical Microlithography XIV - Molecular base sensitivity studies of various DUV resists used in semiconductor fabrication

Ruede, David, Ercken, Monique, Borgers, Tom, Progler, Christopher J.

Year:

2001

Language:

english

File:

PDF, 658 KB

english, 2001

16

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California (Sunday 12 February 2012)] Advances in Resist Materials and Processing Technology XXIX - Patterning development in spin-on hard mask systems for 30nm half-pitch EUV technology

Truffert, Vincent, Pollentier, Ivan, Foubert, Philippe, Lazzarino, Frederic, Anno, Yuusuke, Wilson, Christopher J., Ercken, Monique, Gronheid, Roel, Demuynck, Steven, Buch, Xavier, Somervell, Mark H.,

Year:

2012

Language:

english

File:

PDF, 1.95 MB

english, 2012

17

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 27 February 2011)] Extreme Ultraviolet (EUV) Lithography II - Patterning challenges in setting up a 16nm node 6T-SRAM device using EUV lithography

Vandeweyer, Tom, La Fontaine, Bruno M., Naulleau, Patrick P., De Backer, Johan, Versluijs, Janko, Truffert, Vincent, Verhaegen, Staf, Ercken, Monique, Dusa, Mircea

Year:

2011

Language:

english

File:

PDF, 10.50 MB

english, 2011

18

SPIE Proceedings [SPIE SPIE 31st International Symposium on Advanced Lithography - San Jose, CA (Sunday 19 February 2006)] Optical Microlithography XIX - Dynamic leaching procedure on an immersion interference printer

Gronheid, Roel, Flagello, Donis G., Tenaglia, Enrico, Ercken, Monique

Year:

2006

Language:

english

File:

PDF, 747 KB

english, 2006

19

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 24 February 2013)] Advances in Resist Materials and Processing Technology XXX - Precuring implant photoresists for shrink and patterning control

Winroth, Gustaf, Rosseel, Erik, Delvaux, Christie, Altamirano Sanchez, Efrain, Ercken, Monique, Somervell, Mark H.

Year:

2013

Language:

english

File:

PDF, 403 KB

english, 2013

20

(Invited) Vertical Nanowire FET Integration and Device Aspects

Veloso, A., Altamirano-Sanchez, E., Brus, S., Chan, B. T., Cupak, M., Dehan, M., Delvaux, C., Devriendt, K., Eneman, G., Ercken, M., Huynh-Bao, T., Ivanov, T., Matagne, P., Merckling, C., Paraschiv, V

Journal:

ECS Transactions

Year:

2016

Language:

english

File:

PDF, 781 KB

english, 2016

21

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 26 February 2017)] Advances in Patterning Materials and Processes XXXIV - CMOS patterning over high-aspect ratio topographies for N10/N7 using spin-on carbon hardmasks

Hohle, Christoph K., Gronheid, Roel, Hopf, Toby, Ercken, Monique, Mannaert, Geert, Kunnen, Eddy, Zheng, Tao, Vandenbroeck, Nadia, Sebaai, Farid, Kikuchi, Yoshiaki, Mertens, Hans, Kubicek, Stefan, Demu

Year:

2017

Language:

english

File:

PDF, 516 KB

english, 2017

22

Phase behaviour and solvent diffusion in the system poly(methyl methacrylate)/methanol

Robrecht Moerkerke, Hugo Berghmans, Patrick Vandeweerdt, Peter Adriaensen, Monique Ercken, Dirk Vanderzande, Jan Gelan

Journal:

Macromolecular Chemistry and Physics

Year:

2000

Language:

english

File:

PDF, 54 KB

english, 2000

23

Drug-induced corneal hydration changes monitored in vivo by non-invasive confocal Raman spectroscopy

Roel J. Erckens, Franciscus H. M. Jongsma, James P. Wicksted, Fred Hendrikse, Wayne F. March, Massoud Motamedi

Journal:

Journal of Raman Spectroscopy

Year:

2001

Language:

english

File:

PDF, 113 KB

english, 2001

24

Determining the impact of statistical fluctuations on resist line edge roughness

L.H.A. Leunissen, M. Ercken, G.P. Patsis

Journal:

Microelectronic Engineering

Year:

2005

Language:

english

File:

PDF, 289 KB

english, 2005

25

New lithographic requirements for the implant levels in scaled devices

Tom Vandeweyer, Christina Baerts, Naoto Horiguchi, Monique Ercken

Journal:

Microelectronic Engineering

Year:

2011

Language:

english

File:

PDF, 609 KB

english, 2011

26

Challenges in using optical lithography for the building of a 22 nm node 6T-SRAM cell

M. Ercken, E. Altamirano-Sanchez, C. Baerts, S. Brus, J. De Backer, C. Delvaux, M. Demand, N. Horiguchi, S. Locorotondo, T. Vandeweyer, A. Veloso, S. Verhaegen

Journal:

Microelectronic Engineering

Year:

2010

Language:

english

File:

PDF, 624 KB

english, 2010

27

Optimization of an advanced positive DUV resist for 248 nm L/S pattern printing

M. Ercken, M. Moelants, I. Pollers, I. van Puyenbroeck, M. Goethals, K. Ronse, G. Pawlowski, W. Spiess

Journal:

Microelectronic Engineering

Year:

1999

Language:

english

File:

PDF, 1.17 MB

english, 1999

28

High-speed photographic evaluation of endoscopic lithotripsy devices

H. J. C. M. Sterenborg, Th. M. Reijke, J. Wiersma, R. C. Erckens, F. H. M. Jogsma

Journal:

Year:

1991

Language:

english

File:

PDF, 999 KB

english, 1991

29

Effects of recent and reference antipsychotic agents at human dopamine D2and D3receptor signaling in Chinese hamster ovary cells

Jurgen F.M. Vanhauwe, Martine Ercken, Danielle van de Wiel, Mirek Jurzak, Josée E. Leysen

Journal:

Psychopharmacology

Year:

2000

Language:

english

File:

PDF, 119 KB

english, 2000

30

Impact of habitat diversity on the sampling effort required for the assessment of river fish communities and IBI

Chris Van Liefferinge, Ilse Simoens, Christian Vogt, Tom J. S. Cox, Jan Breine, Dirk Ercken, Peter Goethals, Claude Belpaire, Patrick Meire

Journal:

Year:

2010

Language:

english

File:

PDF, 254 KB

english, 2010

31

A fish-based index of biotic integrity for upstream brooks in Flanders (Belgium)

Jan Breine, Ilse Simoens, Peter Goethals, Paul Quataert, Dirk Ercken, Chris Van Liefferinghe, Claude Belpaire

Journal:

Year:

2004

Language:

english

File:

PDF, 247 KB

english, 2004

32

Rudiments of an ability for time measurement in the cavernicolous fishAnoptichthys jordanihubbs and innes (pisces characidae)

Wilhelmine Erckens, F. Weber

Journal:

Cellular and Molecular Life Sciences

Year:

1976

Language:

english

File:

PDF, 211 KB

english, 1976

33

Adalimumab successful in sarcoidosis patients with refractory chronic non-infectious uveitis

R. J. Erckens, R. L. M. Mostard, P. A. H. M. Wijnen, J. S. Schouten, M. Drent

Journal:

Graefe's Archive for Clinical and Experimental Ophthalmology

Year:

2012

Language:

english

File:

PDF, 241 KB

english, 2012

34

Line edge roughness: experimental results related to a two-parameter model

L.H.A. Leunissen, W.G. Lawrence, M. Ercken

Journal:

Microelectronic Engineering

Year:

2004

Language:

english

File:

PDF, 193 KB

english, 2004

35

Blockade of the IKs potassium channel: An overlooked cardiovascular liability in drug safety screening?

Rob Towart, Joannes T.M. Linders, An N. Hermans, Jutta Rohrbacher, Henk J. van der Linde, Martine Ercken, Miroslav Cik, Peter Roevens, Ard Teisman, David J. Gallacher

Journal:

Journal of Pharmacological and Toxicological Methods

Year:

2009

Language:

english

File:

PDF, 858 KB

english, 2009

36

Application of a multivariate technique to Raman spectra for quantification of body chemicals

Goetz, M.J., Jr., Cote, G.L., Erckens, R., March, W., Motamedi, M.

Journal:

IEEE Transactions on Biomedical Engineering

Year:

1995

Language:

english

File:

PDF, 423 KB

english, 1995

37

Avalon

Erckens, H., Busser, G.-A., Pradalier, C., Siegwart, R.

Journal:

IEEE Robotics & Automation Magazine

Year:

2010

Language:

english

File:

PDF, 1.76 MB

english, 2010

38

Body size and dispersal mode as key traits determining metacommunity structure of aquatic organisms

T. De Bie, L. De Meester, L. Brendonck, K. Martens, B. Goddeeris, D. Ercken, H. Hampel, L. Denys, L. Vanhecke, K. Van der Gucht, J. Van Wichelen, W. Vyverman, S. A. J. Declerck

Journal:

Ecology Letters

Year:

2012

Language:

english

File:

PDF, 314 KB

english, 2012

39

Raman Spectroscopy Studies of Metabolic Concentrations in Aqueous Solutions and Aqueous Humor Specimens

Wicksted, James P., Erckens, Roel J., Motamedi, Massoud, March, Wayne F.

Journal:

Applied Spectroscopy

Year:

1995

Language:

english

File:

PDF, 680 KB

english, 1995

40

3316 Monitoring the water gradient in the in vivo rabbit cornea using confocal raman spectroscopy

R.J. Erckens, F.H.M. Jongsma, J.P. Wicksted, M. Motamedi, F. Hendrikse, W.F. March

Journal:

Vision Research

Year:

1995

Language:

english

File:

PDF, 95 KB

english, 1995

41

3315 Confocal in vivo probing of proteins and water in the rabbit cornea

F.H.M. Jongsma, R.J. Erckens, J.P. Wicksted, M. Motamedi, F. Hendrikse, W.F. March

Journal:

Vision Research

Year:

1995

Language:

english

File:

PDF, 95 KB

english, 1995

42

Ecological characteristics of small farmland ponds: Associations with land use practices at multiple spatial scales

Steven Declerck, Tom De Bie, Dirk Ercken, Henrietta Hampel, Sofie Schrijvers, Jeroen Van Wichelen, Virginie Gillard, Robert Mandiki, Bertrand Losson, Dirk Bauwens, Stijn Keijers, Wim Vyverman, Boudewi

Journal:

Biological Conservation

Year:

2006

Language:

english

File:

PDF, 283 KB

english, 2006

43

Inflammatory activity assessment by F18 FDG-PET/CT in persistent symptomatic sarcoidosis

R.L.M. Mostard, S. Vöö, M.J.P.G. van Kroonenburgh, J.A. Verschakelen, P.A.H.M. Wijnen, P.J. Nelemans, R.J. Erckens, M. Drent

Journal:

Respiratory Medicine

Year:

2011

Language:

english

File:

PDF, 331 KB

english, 2011

44

Characterization of Tagete spatula cDNA Clones Obtained by Differential Screening in Relation to Thiophene Biosynthesis

John J.M.R. Jacobs, Leonard Kluijtmans, Zeban M.H. Kolen, Karin Erckens, Randy R.J. Arroo, Anton F. Croes, George J. Wullems

Journal:

Journal of Plant Physiology

Year:

1995

Language:

english

File:

PDF, 572 KB

english, 1995

45

Noninvasive Raman spectroscopic identification of intraocular lens material in the living human eye

Roel J Erckens, Wayne F March, Franciscus H Jongsma, James P Wicksted, Frederick Hendrikse, Eefke E Smit, Massoud Motamedi

Journal:

Journal of Cataract & Refractive Surgery

Year:

2001

Language:

english

File:

PDF, 377 KB

english, 2001

46

Identification of intraocular lens materials using confocal Raman spectroscopy

Eefke E Smit, Roel J Erckens, Fred Hendrikse, Massoud Motamedi, James P Wicksted, Wayne F March

Journal:

Journal of Cataract & Refractive Surgery

Year:

1999

Language:

english

File:

PDF, 332 KB

english, 1999

47

SPIE Proceedings [SPIE Microlithography '99 - Santa Clara, CA (Sunday 14 March 1999)] Optical Microlithography XII - Variable-threshold resist models for lithography simulation

Randall, John, Ronse, Kurt G., Marschner, Thomas, Goethals, Anne-Marie, Ercken, Monique, Van den Hove, Luc

Year:

1999

Language:

english

File:

PDF, 376 KB

english, 1999

48

SPIE Proceedings [SPIE OE/LASE '94 - Los Angeles, CA (Sunday 23 January 1994)] Advances in Laser and Light Spectroscopy to Diagnose Cancer and Other Diseases - Monitoring of aqueous humor metabolites using Raman spectroscopy

Wicksted, James P., Erckens, Roel J., Motamedi, Massoud, March, Wayne F., Alfano, Robert R.

Year:

1994

Language:

english

File:

PDF, 753 KB

english, 1994

49

SPIE Proceedings [SPIE 26th Annual International Symposium on Microlithography - Santa Clara, CA (Sunday 25 February 2001)] Advances in Resist Technology and Processing XVIII - 193-nm contact photoresist reflow feasibility study

Lucas, Kevin D., Slezak, Mark, Ercken, Monique, Van Roey, Frieda, Houlihan, Francis M.

Year:

2001

Language:

english

File:

PDF, 1.36 MB

english, 2001

50

[IEEE 2010 IEEE Symposium on VLSI Technology - Honolulu, HI, USA (2010.06.15-2010.06.17)] 2010 Symposium on VLSI Technology - High yield sub-0.1µm2 6T-SRAM cells, featuring high-k/metal-gate finfet devices, double gate patterning, a novel fin etch strategy, full-field EUV lithography and optimized junction design & layout

Horiguchi, N., Demuynck, S., Ercken, M., Locorotondo, S., Lazzarino, F., Altamirano, E., Huffman, C., Brus, S., Demand, M., Struyf, H., De Backer, J., Hermans, J., Delvaux, C., Vandeweyer, T., Baerts,

Year:

2010

Language:

english

File:

PDF, 1.49 MB

english, 2010

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